ZnO layers deposited by Atomic Layer Deposition
نویسندگان
چکیده
منابع مشابه
Effects of Al Doping on the Properties of ZnO Thin Films Deposited by Atomic Layer Deposition
The tuning of structural, optical, and electrical properties of Al-doped ZnO films deposited by atomic layer deposition technique is reported in this work. With the increasing Al doping level, the evolution from (002) to (100) diffraction peaks indicates the change in growth mode of ZnO films. Spectroscopic ellipsometry has been applied to study the thickness, optical constants, and band gap of...
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ژورنال
عنوان ژورنال: Journal of Physics: Conference Series
سال: 2013
ISSN: 1742-6588,1742-6596
DOI: 10.1088/1742-6596/471/1/012015